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A Highly Tunable Barium Strontium Titanate Thin Film MIM Varactor With Floating Metal

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preprint
posted on 25.08.2021, 12:35 by S NathS Nath
A ferroelectric metal insulator metal (MIM) varactor structure incorporating a floating metal and coplanar waveguide (CPW) has been introduced here. The work of the proposed varactor is based on the field-dependent material properties of (Ba,Sr)TiO3 (BST) thin film. A capacitance tunability of 44% has been achieved for the bias voltage of 0 V to 10 V over a frequency range of 1 GHz to 3 GHz. The proposed varactor structure yields a compact area, high capacitance density, and reduced mask process (2 masks)

History

Email Address of Submitting Author

skn.st06@nycu.edu.tw

ORCID of Submitting Author

https://orcid.org/0000-0002-2392-2345

Submitting Author's Institution

National Yang Ming Chiao Tung University

Submitting Author's Country

Taiwan