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Development of High-Sensitivity Pressure Sensor with On-chip Differential Transistor Amplifier

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posted on 2021-07-06, 17:31 authored by Mikhail BasovMikhail Basov

A mathematical model of a high-sensitivity pressure sensor with a novel electrical circuit utilizing piezosensitive transistor differential amplifier with negative feedback loop (PDA-NFL) is presented. Circuits utilizing differential transistor amplifiers based on vertical n-p-n and lateral p-n-p transistors are analyzed and optimized for sensitivity to pressure and stability of output signal in operating temperature range. Parameters of fabrication process necessary for modeling of I-V characteristics of transistors are discussed. The results of the model are sufficiently close to the experimental data.


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Submitting Author's Institution

Dukhov Automatics Research Institute (VNIIA)

Submitting Author's Country

  • Russian Federation