First Demonstration of Ultra-High Precision 4Kb 28nm HKMG 1FeFET-1T Based Memory Array Macro for Highly Scaled Deep Learning Applications

This paper reports high precision, highly linear MAC operation conducted on 28nm ferroelectric (Fe) FET (FeFET) based 4Kb computing-in-memory (CIM) core with 1FeFET-1T structure. The CIM-macro consists of 4 Kbit ultra-high precision FeFET based synaptic core, ADCs, and peripheral components for data processing. The crossbar array in the synaptic core was divided into 8×8 tiles for minimizing the voltage swing variations across word-line (WL), source-line (SL) and bit-line (BL). The FeFET-based macro achieved software-comparable inference accuracy for LeNET-5 and VGG-16 networks for MNIST and CIFAR-10 datasets.