High Sensitivity and Full-circle Optical Rotary Sensor for Non-cooperatively Tracing Wrist Tremor with Nanoradian Resolution
In this paper, a novel optical rotary sensor based on laser self-mixing interferometry is developed for the full-circle rotation measurement. The proposed sensor is convenient to use for it does not need any contact with the target or a cooperative mirror. A prototype is fabricated and tested. The measured results demonstrate a good performance compared with other optical rotary sensors, in terms of the 0.1 μrad resolution, the 2.33×10-4 linearity and 2 μrad stability over one hour. Additionally, the repeatability error is below 14.66 mrad under 9-group full-circle tests, which exhibits the potential to be instrumentalized reliably. Error analysis and limitation discussion have been also carried out. Although the accuracy needs further improvement compared with the best rotary sensor, this method has its unique advantages of high resolution, non-cooperative target sensing and electromagnetic immunity. Hence, the proposed optical rotary sensor provides a promising alternative in precise rotation measurement, tremor tracing and nano-motion monitoring.
In this paper, a novel optical rotary sensor based on laser self-mixing interferometry is developed for the full-circle rotation measurement. The proposed sensor is convenient to use for it does not need any contact with the target or a cooperative mirror. A prototype is fabricated and tested. The measured results demonstrate a good performance compared with other optical rotary sensors, in terms of the 0.1 μrad resolution, the 2.33×10-4 linearity and 2 μrad stability over one hour. Additionally, the repeatability error is below 14.66 mrad under 9-group full-circle tests, which exhibits the potential to be instrumentalized reliably. Error analysis and limitation discussion have been also carried out. Although the accuracy needs further improvement compared with the best rotary sensor, this method has its unique advantages of high resolution, non-cooperative target sensing and electromagnetic immunity. Hence, the proposed optical rotary sensor provides a promising alternative in precise rotation measurement, tremor tracing and nano-motion monitoring.
Funding
National Key Research and Development Program of China (2020YFC2200204);
National Science Fund for Excellent Young Scholars (51722506).
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Email Address of Submitting Author
xx19@mails.tsinghua.edu.cnORCID of Submitting Author
https://orcid.org/0000-0002-3839-6050Submitting Author's Institution
Tsinghua UniversitySubmitting Author's Country
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in IEEE Transactions on Industrial Electronics