TechRxiv
Preprint. Investigation of High Sensitivity Piezoresistive Pressure Sensors for -0.5…+0.5 kPa.pdf (1021.26 kB)

Investigation of High Sensitivity Piezoresistive Pressure Sensors for -0.5…+0.5 kPa

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preprint
posted on 07.07.2021, 20:26 by Mikhail Basov, Denis Prigodskiy
The investigation of the pressure sensor chip’s design developed for operation in ultralow differential pressure ranges has been conducted. The optimum geometry of a membrane has been defined using available technological resources. The pressure sensor chip with an area of 6.15х6.15 mm has an average sensitivity S of 34.5 mV/кPa/V at nonlinearity 2KNL = 0.81 %FS and thermal hysteresis up to 0.6 %FS was created. Owing to the chip connection with stop elements, the burst pressure reaches 450 кPa.

History

Email Address of Submitting Author

engineerbasovm@gmail.com

ORCID of Submitting Author

0000-0003-0798-4500

Submitting Author's Institution

Dukhov Automatics Research Institute (VNIIA)

Submitting Author's Country

Russian Federation