Preprint. Investigation of High Sensitivity Piezoresistive Pressure Sensors for -0.5…+0.5 kPa.pdf (1021.26 kB)
Download fileInvestigation of High Sensitivity Piezoresistive Pressure Sensors for -0.5…+0.5 kPa
The investigation of the
pressure sensor chip’s design developed for operation in ultralow differential
pressure ranges has been conducted. The optimum geometry of a membrane has been
defined using available technological resources. The pressure sensor chip with
an area of 6.15х6.15
mm has an average sensitivity S of 34.5 mV/кPa/V at nonlinearity 2KNL = 0.81 %FS and
thermal hysteresis up to 0.6 %FS was created. Owing to the chip connection with
stop elements, the burst pressure reaches 450 кPa.