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Mitigation of substrate coupling effects in RF switch by localized substrate removal using laser processing

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posted on 09.09.2020 by Arun BHASKAR, Justine PHILIPPE, Etienne OKADA, Flavie BRAUD, Jean-Francois Robillard, Cédric DURAND, Frédéric GIANESELLO, Daniel GLORIA, Christophe GAQUIERE, Emmanuel Dubois
Mitigation of substrate coupling effects in RF switch by localized substrate removal using laser processing

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Email Address of Submitting Author

emmanuel.dubois@iemn.fr

ORCID of Submitting Author

https://orcid.org/0000-0002-0347-010X

Submitting Author's Institution

IEMN-CNRS-UNIV-LILLE

Submitting Author's Country

France

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