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Mitigation of substrate coupling effects in RF switch by localized substrate removal using laser processing
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  • Arun BHASKAR ,
  • Justine PHILIPPE ,
  • Etienne OKADA ,
  • Flavie BRAUD ,
  • Jean-Francois Robillard ,
  • Cédric DURAND ,
  • Frédéric GIANESELLO ,
  • Daniel GLORIA ,
  • Christophe GAQUIERE ,
  • Emmanuel Dubois
Arun BHASKAR
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Justine PHILIPPE
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Etienne OKADA
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Flavie BRAUD
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Jean-Francois Robillard
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Cédric DURAND
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Frédéric GIANESELLO
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Daniel GLORIA
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Christophe GAQUIERE
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Emmanuel Dubois
IEMN-CNRS-UNIV-LILLE

Corresponding Author:[email protected]

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Abstract

Mitigation of substrate coupling effects in RF switch by localized substrate removal using laser processing