Development of High-Sensitivity Pressure Sensor with On-chip
Differential Transistor Amplifier
A mathematical model of a high-sensitivity pressure sensor with a novel
electrical circuit utilizing piezosensitive transistor differential
amplifier with negative feedback loop (PDA-NFL) is presented. Circuits
utilizing differential transistor amplifiers based on vertical n-p-n and
lateral p-n-p transistors are analyzed and optimized for sensitivity to
pressure and stability of output signal in operating temperature range.
Parameters of fabrication process necessary for modeling of I-V
characteristics of transistors are discussed. The results of the model
are sufficiently close to the experimental data.