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Modeling the Evolution of Trap States with Thermal Post-deposition Treatments in Sol-gel Indium Zinc Oxide TFTs
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  • Neel Chatterjee ,
  • Adam M Weidling ,
  • P. Paul Ruden ,
  • Sarah Swisher
Neel Chatterjee
University of Minnesota, University of Minnesota

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Adam M Weidling
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P. Paul Ruden
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Sarah Swisher
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Metal oxides have been investigated for use in displays and wearable electronics, owing to their high mobility in the amorphous state. In solution-processed oxide thin-film transistors, post-deposition thermal processing significantly change the film’s transport properties, and is essential for high-performance devices. The mobility, bias stability and trapping-detrapping related hysteresis are improved with higher processing temperatures, which is generally attributed to decreased localized states which act as electron traps. Here we develop a model to validate that post-deposition processing indeed changes the density and properties of the localized states. We obtain good agreement between this model and the experimental data measured from sol-gel indium zinc oxide TFTs. When the processing temperature increases from 300 to 500 0C, the model indicates that the trap state density in the bulk semiconductor and at the interface decrease by a factor of 5 and a factor of 3, respectively. Furthermore, the localized states become shallower, and the band mobility increases at higher processing temperatures.