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A Highly Tunable Barium Strontium Titanate Thin Film MIM Varactor With Floating Metal
  • S Nath
S Nath
National Yang Ming Chiao Tung University

Corresponding Author:[email protected]

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Abstract

A ferroelectric metal insulator metal (MIM) varactor structure incorporating a floating metal and coplanar waveguide (CPW) has been introduced here. The work of the proposed varactor is based on the field-dependent material properties of (Ba,Sr)TiO3 (BST) thin film. A capacitance tunability of 44% has been achieved for the bias voltage of 0 V to 10 V over a frequency range of 1 GHz to 3 GHz. The proposed varactor structure yields a compact area, high capacitance density, and reduced mask process (2 masks)
Dec 2021Published in IEEE Microwave and Wireless Components Letters volume 31 issue 12 on pages 1283-1286. 10.1109/LMWC.2021.3110981