Double-band Metasurface Infrared Optics for Integrated Multi-channel
Spectral Sensors
Abstract
On the basis of the constructed multi-channel metasurface lens array,
the design scheme of the integrated infrared spectrum detector is given.
The integrated infrared spectrum detector consists of surface plasmon
filter array, multi-channel metasurface lens array and infrared detector
array. Effective detection of infrared absorption peaks and reference
wavelengths of three gases. First, a metal hole-type surface plasmon
filter array is designed. By adjusting the structural parameters of
metal holes, the resonance characteristics of surface plasmons can be
effectively adjusted, thereby realizing the adjustment of
electromagnetic wave filtering characteristics. By adjusting the
relevant structural parameters, four groups of metal hole arrays with
different structural parameters are finally designed, which can achieve
effective filtering of electromagnetic waves of the desired wavelength,
and their transmittance is exceed 70%, and the FWHM of the transmission
peak is less than 0.1 μm. Secondly, an infrared detector array composed
of a photothermal conversion area and a thermoelectric conversion area
is designed, and two high-efficiency electromagnetic wave absorbers
based on the FP cavity resonance principle and the surface plasmon
resonance principle are proposed. In the end, the difficulties of
narrow-band filtering, wavefront manipulation, and efficient absorption
of electromagnetic waves in the mid- and long-wave infrared band were
successfully solved, laying a technical foundation for the development
of integrated multi-component infrared gas sensors.