Abstract
We report a vertical β-Ga2O3 Schottky
Barrier Diode (SBD) with BaTiO3 as field plate oxide on low doped thick
epitaxial layer exhibiting 2.1 kV breakdown voltage. A thick drift layer
of 11 μm with a low effective doping concentration of
8×1015 cm−3 is used to achieve high
breakdown voltage. Using the high-k dielectric with dielectric constant
of 248, the breakdown voltage increases from 816V for the
non-field-plated SBD to 2152V (>2x improvement) for the
field-plated SBD without compromising the on-state performance. The
diode dimensions are varied to analyze the effect of edge high-field
related leakage with reverse bias and also the effect of current
spreading during forward operation. Very uniform distribution of
breakdown voltages of 2152V±20V are observed for the diode diameters
from 50 μm to 300 μm for the field-plated SBDs. The on and off state
power losses are also analyzed and compared with the non-field-plated
devices and the switching losses are estimated analytically.