Ultra-Low Reverse Leakage in Large Area Kilo-Volt class β-Ga2O3 Trench
Schottky Barrier Diode with High-k Dielectric RESURF
Abstract
We present our findings on the utilization of a high permittivity
dielectric, RESURF, in β-Ga2O3 trench Schottky barrier diodes. Our
research demonstrates the achievement of ultra-low reverse leakage
current in both small -scale and large-scale devices, with a breakdown
voltage exceeding 1kV, thanks to the high-k RESURF technology.
Furthermore, we assess the switching performance of these large-area
devices and illustrate their competitive standing when compared to
state-of-the-art commercial SiC devices. Additionally, we provide
evidence of the superior thermal stability exhibited by high-k trench
devices in comparison to SiC devices.