Abstract
This survey paper compiles and benchmarks the performance of integrated
magnetic sensors, in terms of their noise and full-scale magnetic field.
In total, we collected performance metrics of 31 sensors realized in
various technologies. For each sensor, we derived a noise model to
estimate the noise under the same conditions. We obtained a
comprehensive benchmark with a focus on integrated devices. We also
measured the noise spectrum of 11 of those sensors to confirm our noise
model. Given that for many emerging applications, such as tactile,
current, torque and biomagnetic sensing, the signal of interest is the
field gradient to reject magnetic stray fields, we extended the
benchmark to gradiometers. We developed a low-noise measurement setup
and a low-field gradient (full scale: 10 μT/mm) generation setup to
characterize magnetic gradiometers in this regime. The paper discusses
the key sensor trade-off between precision and range, and summarizes the
technology trends graphically on a trade-off curve, providing broad
insight. This paper has been ACCEPTED for publication in IEEE
Access.