Abstract
Micro-electro mechanical systems (MEMS) accelerometer has been
implemented in various applications across industries. To expand its
application to textiles, here we propose a facile fabrication and
packaging method for fiber-shaped flexible MEMS thermal accelerometer.
The sensing structure was fabricated through a standard microfabrication
process on a thin polyimide film substrate. The film was then cut into
stick shape and packaged inside a flexible resin tube through a facile
insertion process. A sensitivity improvement strategy by mitigating the
thermal mass around the sensing structure was also introduced.
Gravitational acceleration measurement using the proposed sensors was
demonstrated using an inclination stage. Finally, measurement of human
hand movement using the proposed sensors was demonstrated.